GaN Films with Highly c-Axis Preferred Orientation Deposited on Free-Standing Diamond Films Show Great Potential for High-Power Devices
Researchers from Dalian University of Technology in the People's Republic of China have successfully grown GaN films with highly c-axis preferred orientation on free-standing diamond films using low-temperature electron cyclotron resonance plasma enhanced metal organic chemical vapor deposition (ECR-PEMOCVD). The team, led by D. Zhang, found that the dense and uniform GaN films exhibited excellent heat dissipation properties, making them ideal for the development of high-power semiconductor devices. The researchers achieved optimal deposition temperature of 400 degrees C, resulting in intense ultraviolet near band edge emission and weak yellow luminescence in the room temperature photoluminescence spectra.
Key Takeaways:
- GaN films with highly c-axis preferred orientation were successfully deposited on free-standing thick diamond films using ECR-PEMOCVD.
- The optimal deposition temperature for achieving dense and uniform GaN films was found to be 400 degrees C.
- The room temperature photoluminescence spectra of the optimized GaN film showed intense ultraviolet near band edge emission and weak yellow luminescence.
- The obtained GaN/diamond structure has great potential for the development of high-power semiconductor devices due to its excellent heat dissipation nature.
- The GaN films were analyzed using X-ray diffraction (XRD), Hall Effect measurement (HL), room temperature photoluminescence (PL), and atomic force microscopy (AFM).
- The researchers concluded that the GaN/diamond structure has significant potential for high-power device development.
Statistics:
- 400 degrees C: the optimal deposition temperature for achieving dense and uniform GaN films.
- 10: the issue number of the Materials Research Bulletin where the study was published.
- 2011: the year the study was published in Materials Research Bulletin.
- 1584-1585: the page numbers of the Materials Research Bulletin where the study was published.
- 46: the volume number of the Materials Research Bulletin where the study was published.
Sources:
- Materials Research Bulletin, "Highly c-axis oriented GaN films grown on free-standing diamond substrates for high-power devices," Volume 46, Issue 10, Pages 1582-1585 (2011).
- Dalian University of Technology, "Highly c-axis oriented GaN films grown on free-standing diamond substrates for high-power devices," Research Paper (2011).
- Electronics Newsweekly, "GaN Films with Highly c-Axis Preferred Orientation Show Great Potential for High-Power Devices," VerticalNews.com (2011).