Patent Application for Information Processing Apparatus and Recipe Editing Method Filed in March 2025
A semiconductor manufacturing apparatus performs processes by executing recipes that combine settings for various categories such as temperature, gas, pressure, plasma, and mechanics. A patent application by inventor YAMAGUCHI, Tatsuya, filed on March 18, 2025, details an information processing apparatus that edits recipes by sequentially arranging steps based on the time during which the category setting continues and the input of the setting value of the setting item. The invention aims to improve the efficiency of the recipe editing process by allowing operators to easily manage and edit recipes.
Key Takeaways:
- The patent application describes an information processing apparatus that includes a display block operation reception unit, a property setting input reception unit, and a recipe edition unit.
- The apparatus receives inputs from the operator to arrange display blocks visually indicating the setting of at least one category among a plurality of categories included in a recipe.
- The recipe edition unit edits the recipe by sequentially arranging steps, each made up of a combination of all setting items set with the setting values and the time during which the setting continues, as a minimum unit.
- The invention aims to improve the efficiency of the recipe editing process by allowing operators to easily manage and edit recipes.
- The patent application claims include a method for receiving inputs from the operator to arrange display blocks, receiving inputs of setting values, and editing the recipe by sequentially arranging steps.
- The invention includes multiple display blocks, each representing the time during which the setting of the category continues, and receives the input of the setting value from the operator through setting of a referenced table.
- The apparatus can output a step made up of a combination of all setting items set with the setting values and a time shorter than the time during which the setting continues.
Statistics:
- The patent application was filed on March 18, 2025.
- The appliance was made available online on October 2, 2025.
- The patent application includes 7 claims.
- The apparatus includes a display block operation reception circuitry, a property setting input reception circuitry, and a recipe edition circuitry.
- The invention can output a step made up of a combination of all setting items set with the setting values and a time shorter than the time during which the setting continues.
Sources:
- YAMAGUCHI, Tatsuya. Information Processing Apparatus, Recipe Editing Method, And Semiconductor Manufacturing Apparatus. U.S. Patent Application Number 20250306572, filed March 18, 2025 and posted October 2, 2025. Patent URL (for desktop use only): https://ppubs.uspto.gov/pubwebapp/external.html?q=(20250306572)&db=US-PGPUB&type=ids