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Detection equipment

Innovative Fault Detection System for Vacuum Pumps

Strategic Insights

— 1 min read

A new patent has been published for a fault detection system for vacuum pumps, which uses acoustic sensors to detect sounds and analyze them to identify potential faults in the pump. This innovation aims to improve the reliability and safety of vacuum pumps, which are commonly used in various industries, including semiconductors and displays. The system can detect faults in real-time, reducing production costs and increasing the lifespan of the pumps.

Key Takeaways:

  • The fault detection system uses an acoustic sensor to collect sound patterns and a processor to analyze them, identifying potential faults in the vacuum pump.
  • The system can detect faults in real-time, improving the reliability and safety of vacuum pumps.
  • Vacuum pumps are widely used in industries such as semiconductors, displays, food, medicine, and space science.
  • The system can analyze sound patterns based on time in a state during operating the vacuum pump to detect a fault.
  • The fault detection system includes a vibration sensor, current sensor, laser displacement sensor, and processor to identify a failure of the vacuum pump.
  • The processor uses the acoustic pattern as a fault detection reference value and uses the vibration pattern, current, and position variations as auxiliary reference information.
  • The system can select a parameter that is a major cause of the fault and give a weight to the corresponding parameter to predict the fault with a higher frequency.

Statistics:

  • 5-7 years: Average replacement cycle of vacuum pumps.
  • 24 hours a day, 365 days a year: Operating schedule of vacuum pumps.
  • 2022: Year the patent was filed.
  • 2025: Year the patent was published online.
  • 12442711: Patent number for the fault detection system for vacuum pumps.

Sources:

  • Lim, Yong-Il. Fault detection system for vacuum pump. U.S. Patent Number 12442711, filed October 2022, and published online on October 14, 2025.
  • Patent URL: https://ppubs.uspto.gov/pubwebapp/external.html?q=(12442711)&db=USPAT&type=ids

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