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Semiconductor industry

ASTeX Invests in Low Entropy Systems, Boosting Semiconductor Fabrication Efficiency

Strategic Insights

— 1 min read

WOBURN, Mass., Oct. 17, 1995--ASTeX, a leading manufacturer of systems and components for advanced materials production, has invested $250,000 in Low Entropy Systems, Inc. (LES), a Boston-based company that has developed a revolutionary "smart sensor" monitoring system for measuring thin film etching or deposition rate and rate uniformity. The SEMATECH-installed beta units have been tested in production fabs at Digital Equipment Corp., IBM, Texas Instruments, and Motorola, demonstrating significant potential for cost savings in semiconductor fabrication.

Key Takeaways:

  • ASTeX has acquired a minimum 15% ownership position in LES through the investment, with Dr. Richard S. Post, ASTeX President and CEO, joining the LES Board of Directors.
  • The LES 1000-IS Full Wafer Imaging Interferometer features a 180,000-pixel CCD sensor, optics, and data acquisition and analysis software, enabling real-time monitoring of 180,000 interferometers to determine critical process properties.
  • Each unit has an approximate price of $50,000 and can reduce the number of test wafers required to qualify a production tool, maximize productivity, and offer significant savings.
  • Dr. William T. Connor, LES President, emphasized the importance of minimizing total cost of semiconductor fabrication as wafers get larger and more complex.
  • The suppliers to the U.S. semiconductor capital equipment manufacturers are estimated to have a $3.5 billion market in 1996, with technological advancements driving growth and internationalization.
  • ASTeX seeks to partner with quality value-added suppliers like LES to develop innovative products for the industry.
  • The investment highlights ASTeX's focus on collaborating with cutting-edge technology providers to drive innovation and efficiency in semiconductor fabrication.

Statistics:

  • ASTeX has invested $250,000 in Low Entropy Systems, Inc. (LES).
  • The 1000-IS Full Wafer Imaging Interferometer features 180,000 pixels.
  • Each unit has an approximate price of $50,000.
  • The U.S. semiconductor capital equipment manufacturers' suppliers are estimated to have a $3.5 billion market in 1996.

Sources:

  • "ASTeX Invests in Low Entropy Systems to Boost Semiconductor Fabrication Efficiency" (Business Wire, Oct. 17, 1995)
  • "Low Entropy Systems: The Smart Sensor Revolution" ( press release, date not specified)

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