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Computer industry

IBM Receives Patent for Non-Linearity Determination of Positioning Scanner of Measurement Tool

Strategic Insights

— 1 min read

A team of inventors at International Business Machines Corporation has developed a method for calibrating measurement systems used in manufacturing, such as measuring IC chips. The patent, filed on August 25, 2011, and published on March 24, 2015, discloses a system for determining non-linearity of a positioning scanner, which is essential for accurate measurements. The system uses scanning probe microscopy to measure the surface of a sample at multiple angles, allowing for the cancellation of measurements corresponding to imperfections due to the sample's surface.

Key Takeaways:

  • The patent, titled "Non-Linearity Determination of Positioning Scanner of Measurement Tool," was filed on August 25, 2011, and published on March 24, 2015.
  • The inventors, George W. Banke, Jr., James M. Robert, and Carlos Strocchia-Rivera, developed a method for determining non-linearity of a positioning scanner using scanning probe microscopy.
  • The method involves scanning a surface of a sample at multiple angles, allowing for the cancellation of measurements corresponding to imperfections due to the sample's surface.
  • The system can be used to calibrate measurement tools used in manufacturing, such as measuring IC chips.
  • The patent includes six aspects of the disclosure, including a method, a system, a program product, a scanning probe microscope, and a computer-readable medium.
  • The system can be deployed on a computer infrastructure to determine non-linearity of a positioning scanner.

Statistics:

  • 6 aspects of the disclosure: method, system, program product, scanning probe microscope, computer-readable medium, and method of generating a system.
  • 5 different scanning angles used to determine non-linearity of the positioning scanner.
  • 2 different profiles obtained for each scanning angle, resulting in a plurality of profiles.
  • 1 method for controlling scanning a surface of a sample.

Sources:

  • Banke, Jr., George W.; Robert, James M.; Strocchia-Rivera, Carlos. Non-Linearity Determination of Positioning Scanner of Measurement Tool. U.S. Patent Number 8990961, filed August 25, 2011, and published online on March 24, 2015. Patent URL: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&novalid=true&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&OS=PN/8990961&RS=PN/8990961
  • NewsRx LLC. IBM Receives Patent for Non-Linearity Determination of Positioning Scanner of Measurement Tool. NewsRx LLC, 2015.

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