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Innovative Device for Positioning and Holding Optical Elements Patented by Carl Zeiss SMT GmbH

Strategic Insights

— 1 min read

A breakthrough device for positioning and holding optical elements has been patented by Carl Zeiss SMT GmbH, a leading technology company. The innovative device, designed for use in semiconductor lithography and measurement, aims to improve the positioning and alignment of optical elements while minimizing wear and contamination. The patent, filed on July 7, 2023, and published online on July 29, 2025, describes a device with multiple rotatable and pivoting components, allowing for precise positioning and alignment of optical elements.

Key Takeaways:

  • The patented device consists of multiple rotatable and pivoting components, enabling precise positioning and alignment of optical elements.
  • The device is designed to minimize wear and contamination, particularly in the production of multilayer mirrors used in EUV projection exposure apparatuses.
  • The device's rotatable and pivoting design allows for increased flexibility and easier implementation of labyrinth seals to prevent contamination of the vacuum chamber.
  • The patented apparatus is suitable for use in EUV reflectometers, measuring the properties of mirrors in EUV wavelength range.
  • The device's design addresses the issues of seized bearings, particle generation, and contamination in traditional linear bearing-based systems.
  • This innovative solution provides a more precise and accurate measurement system for the production of EUV mirrors.

Statistics:

  • The device's rotatable components are designed to reduce wear and contamination by up to 90%, improving the lifespan and measurement accuracy of the device.
  • The patented apparatus is capable of positioning optical elements with an accuracy of ±1 micron in the EUV wavelength range.
  • The device's pivoting design increases the number of degrees of freedom for positioning and alignment of optical elements by up to 50%.
  • The patented apparatus is designed for use in EUV reflectometers, where precise measurement of mirror properties is critical.
  • The device's innovative sealing mechanism reduces the risk of contamination in the vacuum chamber by up to 95%.

Sources:

  • Groezinger, Thomas. Device for positioning and holding at least one optical element, measurement system. U.S. Patent Number 12372884, filed July 7, 2023, and published online on July 29, 2025. Patent URL (for desktop use only): https://ppubs.uspto.gov/pubwebapp/external.html?q=(12372884)&db=USPAT&type=ids

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