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Sensors

Patent Application for Physical Quantity Sensor and Inertial Measurement Unit Filed

Strategic Insights

— 1 min read

A patent application for a physical quantity sensor and an inertial measurement unit, filed by inventors Yoshikazu Eguchi, Tomokazu Kobayashi, and Yuichiro Tsuyuki, was made available online on October 2, 2025. The application, which describes a physical quantity sensor that detects acceleration in a Z-axis direction, was filed on March 31, 2025.

According to the inventors' background information, recent years have seen the development of physical quantity sensors using micro electro mechanical system (MEMS) technology. The physical quantity sensor described in the patent application includes a substrate and a movable body swingably provided with respect to the substrate, and the substrate has a protrusion for suppressing excessive swinging of the movable body.

Key Takeaways:

  • The patent application describes a physical quantity sensor that detects acceleration in a Z-axis direction.
  • The sensor includes a substrate and a movable body swingably provided with respect to the substrate.
  • The substrate has a protrusion for suppressing excessive swinging of the movable body.
  • The patent application claims that the physical quantity sensor includes a first region having a through hole, a second region not having the through hole, and a first conductive film provided in the second region.
  • The substrate includes a protrusion overlapping the first conductive film in plan view.
  • The patent application also describes an inertial measurement unit comprising the above-described physical quantity sensor.
  • The claims of the patent application include specifications for the physical quantity sensor and the inertial measurement unit.
  • The patent application states that the first conductive film is a noble metal and that the surface roughness of a third region of the first surface where the first conductive film is not provided is larger than the surface roughness of the first conductive film.

Statistics:

  • The patent application was filed on March 31, 2025.
  • The application was made available online on October 2, 2025.
  • The patent application number is 20250306057.
  • The inventors' names are Yoshikazu Eguchi, Tomokazu Kobayashi, and Yuichiro Tsuyuki.

Sources:

  • EGUCHI, Yoshikazu; KOBAYASHI, Tomokazu; TSUYUKI, Yuichiro. Physical Quantity Sensor And Inertial Measurement Unit. U.S. Patent Application Number 20250306057, filed March 31, 2025 and posted October 2, 2025. Patent URL (for desktop use only): https://ppubs.uspto.gov/pubwebapp/external.html?q=(20250306057)&db=US-PGPUB&type=ids Keywords for this news article include: Patent Application.

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