Innovative Motor Assembly for Semiconductor Manufacturing

A patent recently published highlights a groundbreaking motor assembly design for the semiconductor manufacturing industry, addressing the need for more efficient and reliable inspection systems.

The patent, filed by Garcia, Rudy F. and Xu, Yaojun, proposes an apparatus that integrates a lifting device and a motor assembly to optimize positioning of optical components in ultra-high vacuum environments. The design aims to minimize contamination of the vacuum environment, reduce downtime, and improve overall system performance. By replacing traditional dynamic vacuum feedthrough devices and vacuum bellows, this innovative approach enables seamless integration with existing inspection systems.

Key Takeaways:

• The patent describes a motor assembly for a lifting device, which can be integrated with existing inspection systems, and avoids contamination of the ultra-clean vacuum environment.
• The design includes a detachable motor housing that can be easily replaced without affecting system operation, reducing costly downtime.
• The motor assembly comprises a stepper motor and a gearhead, which is coupled to an input drive shaft of the lifting device, allowing for precise control over the optical component's vertical position.
• The apparatus includes a vibration isolator connecting the lifting device to the optical component, ensuring stable and accurate positioning.
• The lifting device housing features an input port for coupling the gearhead to the input drive shaft, promoting efficient and precise movement.
• The design incorporates a vacuum seal disposed between the lifting device housing and the motor housing, maintaining a high-vacuum environment and preventing contamination.
• The invention addresses the evolving needs of the semiconductor manufacturing industry, which demands improved yield management, metrology, and inspection systems.

Statistics:

• The patent application was filed on October 7, 2022.
• The patent was published online on October 14, 2025.
• The assignee for this patent is KLA Corporation.
• The invention aims to address the challenges posed by smaller defect sizes and the increasing demand for higher-yield semiconductor devices with minimal defects.

Sources:

• Garcia, Rudy F. "Method and apparatus for positioning optical isolator assembly with replaceable motor assembly." U.S. Patent Number 12444643, filed October 7, 2022, and published online on October 14, 2025. Patent URL (for desktop use only): https://ppubs.uspto.gov/pubwebapp/external.html?q=(12444643)&db=USPAT&type=ids