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Electronics industry

Patent Application for Waste Gas Treatment Device and Method Developed by Samsung Electronics

Strategic Insights

— 2 min read

A patent application has been filed for a novel waste gas treatment device and method developed by Samsung Electronics Co. Ltd. The device aims to selectively adsorb and recover xenon (Xe) from waste gas generated during semiconductor manufacturing processes. The invention addresses the growing concern of limited xenon supply and the need for efficient recovery of this critical material.

The inventive concept provides a waste gas treatment device that includes a waste gas inlet and an adsorption unit configured to adsorb competitive adsorption gas and xenon (Xe) from the waste gas. The device also includes a recovery unit to recover the adsorbed xenon. The patent application describes the device, method, and system in detail, including the use of specific adsorbents such as Ag-ZSM-5 and the configuration of the adsorption unit with multiple towers.

Key Takeaways:

  • The waste gas treatment device and method aims to selectively adsorb and recover xenon (Xe) from waste gas generated during semiconductor manufacturing processes.
  • The inventive concept uses a waste gas inlet and an adsorption unit to adsorb competitive adsorption gas and xenon (Xe) from the waste gas.
  • The device includes a recovery unit to recover the adsorbed xenon.
  • The patent application describes the use of specific adsorbents such as Ag-ZSM-5 and the configuration of the adsorption unit with multiple towers.
  • The inventive concept addresses the growing concern of limited xenon supply and the need for efficient recovery of this critical material.
  • The patent application has been filed under U.S. Patent Application Number 20250304445 and posted October 2, 2025.
  • Samsung Electronics Co. Ltd. is the assignee of the patent application.

Statistics:

  • The waste gas treatment device and method aims to recover xenon (Xe) from waste gas generation during semiconductor manufacturing processes.
  • Xenon (Xe) is classified as a rare gas that exists in a trace amount in the air, making it difficult to obtain.
  • The inventive concept uses a waste gas inlet and an adsorption unit to adsorb competitive adsorption gas and xenon (Xe) from the waste gas.
  • The device includes a recovery unit to recover the adsorbed xenon.
  • The patent application describes the use of specific adsorbents such as Ag-ZSM-5.

Sources:

  • Ha, Changho; Hong, Eunsun; Jeong, Cheonwoo; Kim, Jihyun; Kim, Jiwon; Kim, Joonwoo; Kwak, Changhoon; Lee, Joonghoon; Ro, Youngju; Shin, Hye Sun; Song, Han Dock. Waste Gas Treatment Device, Waste Gas Treatment Method, And Waste Gas Adsorption And Recovery System Including The Same. U.S. Patent Application Number 20250304445, filed January 3, 2025 and posted October 2, 2025. Patent URL (for desktop use only): https://ppubs.uspto.gov/pubwebapp/external.html?q=(20250304445)&db=US-PGPUB&type=ids

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