Semiconductor industry
ASTeX Invests in Low Entropy Systems, Boosting Semiconductor Fabrication Efficiency
WOBURN, Mass., Oct. 17, 1995--ASTeX, a leading manufacturer of systems and components for advanced materials production, has invested $250,000 in Low Entropy Systems, Inc. (LES), a Boston-based company that has developed a revolutionary "smart sensor" monitoring system for measuring thin film etching or deposition rate and rate